130 lines
4.4 KiB
JSON
130 lines
4.4 KiB
JSON
{
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"Test Port 1": {
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"Mass Flow Trans": {
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"name": "Custom",
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"Instrument Flow 1": "0.038 sccm",
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"Instrument Flow 2": "4.075 sccm",
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"Instrument Flow 3": "8.151 sccm",
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"Instrument Flow 4": "12.124 sccm",
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"Instrument Flow 5": "16.213 sccm",
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"Instrument Flow 6": "20.165 sccm",
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"Master Reading 1": "0.000 sccm",
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"Master Reading 2": "4.000 sccm",
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"Master Reading 3": "8.000 sccm",
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"Master Reading 4": "12.000 sccm",
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"Master Reading 5": "16.000 sccm",
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"Master Reading 6": "20.000 sccm"
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},
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"Pressure Transducer": {
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"name": "45PSIA",
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"Master Value 1": "0.000 psig",
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"Master Value 2": "6.000 psig",
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"Master Value 3": "12.000 psig",
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"Master Value 4": "18.000 psig",
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"Master Value 5": "24.000 psig",
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"Master Value 6": "30.000 psig",
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"Instrument Pressure 1": "0.000 psig",
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"Instrument Pressure 2": "6.000 psig",
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"Instrument Pressure 3": "11.999 psig",
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"Instrument Pressure 4": "17.998 psig",
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"Instrument Pressure 5": "23.997 psig",
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"Instrument Pressure 6": "29.997 psig"
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}
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},
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"Test Port 2": {
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"Mass Flow Trans": {
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"name": "Custom",
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"Instrument Flow 1": "0.049 sccm",
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"Instrument Flow 2": "4.122 sccm",
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"Instrument Flow 3": "8.171 sccm",
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"Instrument Flow 4": "12.220 sccm",
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"Instrument Flow 5": "16.204 sccm",
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"Instrument Flow 6": "20.221 sccm",
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"Master Reading 1": "0.000 sccm",
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"Master Reading 2": "4.000 sccm",
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"Master Reading 3": "8.000 sccm",
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"Master Reading 4": "12.000 sccm",
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"Master Reading 5": "16.000 sccm",
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"Master Reading 6": "20.000 sccm"
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},
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"Pressure Transducer": {
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"name": "45PSIA",
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"Master Value 1": "0.000 psig",
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"Master Value 2": "6.000 psig",
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"Master Value 3": "12.000 psig",
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"Master Value 4": "18.000 psig",
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"Master Value 5": "24.000 psig",
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"Master Value 6": "30.000 psig",
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"Instrument Pressure 1": "-0.000 psig",
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"Instrument Pressure 2": "5.999 psig",
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"Instrument Pressure 3": "12.000 psig",
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"Instrument Pressure 4": "17.998 psig",
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"Instrument Pressure 5": "23.999 psig",
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"Instrument Pressure 6": "29.999 psig"
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}
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},
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"Test Port 3": {
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"Mass Flow Trans": {
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"name": "Custom",
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"Instrument Flow 1": "0.005 sccm",
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"Instrument Flow 2": "4.091 sccm",
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"Instrument Flow 3": "8.123 sccm",
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"Instrument Flow 4": "12.135 sccm",
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"Instrument Flow 5": "16.175 sccm",
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"Instrument Flow 6": "20.202 sccm",
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"Master Reading 1": "0.000 sccm",
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"Master Reading 2": "4.000 sccm",
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"Master Reading 3": "8.000 sccm",
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"Master Reading 4": "12.000 sccm",
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"Master Reading 5": "16.000 sccm",
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"Master Reading 6": "20.000 sccm"
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},
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"Pressure Transducer": {
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"name": "45PSIA",
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"Master Value 1": "0.000 psig",
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"Master Value 2": "6.000 psig",
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"Master Value 3": "12.000 psig",
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"Master Value 4": "18.000 psig",
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"Master Value 5": "24.000 psig",
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"Master Value 6": "30.000 psig",
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"Instrument Pressure 1": "-0.000 psig",
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"Instrument Pressure 2": "6.000 psig",
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"Instrument Pressure 3": "12.002 psig",
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"Instrument Pressure 4": "18.000 psig",
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"Instrument Pressure 5": "24.002 psig",
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"Instrument Pressure 6": "30.001 psig"
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}
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},
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"Test Port 4": {
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"Mass Flow Trans": {
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"name": "Custom",
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"Instrument Flow 1": "-0.002 sccm",
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"Instrument Flow 2": "4.051 sccm",
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"Instrument Flow 3": "7.989 sccm",
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"Instrument Flow 4": "12.073 sccm",
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"Instrument Flow 5": "16.013 sccm",
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"Instrument Flow 6": "20.043 sccm",
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"Master Reading 1": "0.000 sccm",
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"Master Reading 2": "4.000 sccm",
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"Master Reading 3": "8.000 sccm",
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"Master Reading 4": "12.000 sccm",
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"Master Reading 5": "16.000 sccm",
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"Master Reading 6": "20.000 sccm"
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},
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"Pressure Transducer": {
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"name": "45PSIA",
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"Master Value 1": "0.000 psig",
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"Master Value 2": "6.000 psig",
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"Master Value 3": "12.000 psig",
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"Master Value 4": "18.000 psig",
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"Master Value 5": "24.000 psig",
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"Master Value 6": "30.000 psig",
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"Instrument Pressure 1": "-0.000 psig",
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"Instrument Pressure 2": "5.999 psig",
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"Instrument Pressure 3": "11.999 psig",
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"Instrument Pressure 4": "17.998 psig",
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"Instrument Pressure 5": "23.997 psig",
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"Instrument Pressure 6": "29.997 psig"
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}
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}
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} |