{ "Test Port 1": { "Mass Flow Trans": { "name": "Custom", "Instrument Flow 1": "0.038 sccm", "Instrument Flow 2": "4.075 sccm", "Instrument Flow 3": "8.151 sccm", "Instrument Flow 4": "12.124 sccm", "Instrument Flow 5": "16.213 sccm", "Instrument Flow 6": "20.165 sccm", "Master Reading 1": "0.000 sccm", "Master Reading 2": "4.000 sccm", "Master Reading 3": "8.000 sccm", "Master Reading 4": "12.000 sccm", "Master Reading 5": "16.000 sccm", "Master Reading 6": "20.000 sccm" }, "Pressure Transducer": { "name": "45PSIA", "Master Value 1": "0.000 psig", "Master Value 2": "6.000 psig", "Master Value 3": "12.000 psig", "Master Value 4": "18.000 psig", "Master Value 5": "24.000 psig", "Master Value 6": "30.000 psig", "Instrument Pressure 1": "0.000 psig", "Instrument Pressure 2": "6.000 psig", "Instrument Pressure 3": "11.999 psig", "Instrument Pressure 4": "17.998 psig", "Instrument Pressure 5": "23.997 psig", "Instrument Pressure 6": "29.997 psig" } }, "Test Port 2": { "Mass Flow Trans": { "name": "Custom", "Instrument Flow 1": "0.049 sccm", "Instrument Flow 2": "4.122 sccm", "Instrument Flow 3": "8.171 sccm", "Instrument Flow 4": "12.220 sccm", "Instrument Flow 5": "16.204 sccm", "Instrument Flow 6": "20.221 sccm", "Master Reading 1": "0.000 sccm", "Master Reading 2": "4.000 sccm", "Master Reading 3": "8.000 sccm", "Master Reading 4": "12.000 sccm", "Master Reading 5": "16.000 sccm", "Master Reading 6": "20.000 sccm" }, "Pressure Transducer": { "name": "45PSIA", "Master Value 1": "0.000 psig", "Master Value 2": "6.000 psig", "Master Value 3": "12.000 psig", "Master Value 4": "18.000 psig", "Master Value 5": "24.000 psig", "Master Value 6": "30.000 psig", "Instrument Pressure 1": "-0.000 psig", "Instrument Pressure 2": "5.999 psig", "Instrument Pressure 3": "12.000 psig", "Instrument Pressure 4": "17.998 psig", "Instrument Pressure 5": "23.999 psig", "Instrument Pressure 6": "29.999 psig" } }, "Test Port 3": { "Mass Flow Trans": { "name": "Custom", "Instrument Flow 1": "0.005 sccm", "Instrument Flow 2": "4.091 sccm", "Instrument Flow 3": "8.123 sccm", "Instrument Flow 4": "12.135 sccm", "Instrument Flow 5": "16.175 sccm", "Instrument Flow 6": "20.202 sccm", "Master Reading 1": "0.000 sccm", "Master Reading 2": "4.000 sccm", "Master Reading 3": "8.000 sccm", "Master Reading 4": "12.000 sccm", "Master Reading 5": "16.000 sccm", "Master Reading 6": "20.000 sccm" }, "Pressure Transducer": { "name": "45PSIA", "Master Value 1": "0.000 psig", "Master Value 2": "6.000 psig", "Master Value 3": "12.000 psig", "Master Value 4": "18.000 psig", "Master Value 5": "24.000 psig", "Master Value 6": "30.000 psig", "Instrument Pressure 1": "-0.000 psig", "Instrument Pressure 2": "6.000 psig", "Instrument Pressure 3": "12.002 psig", "Instrument Pressure 4": "18.000 psig", "Instrument Pressure 5": "24.002 psig", "Instrument Pressure 6": "30.001 psig" } }, "Test Port 4": { "Mass Flow Trans": { "name": "Custom", "Instrument Flow 1": "-0.002 sccm", "Instrument Flow 2": "4.051 sccm", "Instrument Flow 3": "7.989 sccm", "Instrument Flow 4": "12.073 sccm", "Instrument Flow 5": "16.013 sccm", "Instrument Flow 6": "20.043 sccm", "Master Reading 1": "0.000 sccm", "Master Reading 2": "4.000 sccm", "Master Reading 3": "8.000 sccm", "Master Reading 4": "12.000 sccm", "Master Reading 5": "16.000 sccm", "Master Reading 6": "20.000 sccm" }, "Pressure Transducer": { "name": "45PSIA", "Master Value 1": "0.000 psig", "Master Value 2": "6.000 psig", "Master Value 3": "12.000 psig", "Master Value 4": "18.000 psig", "Master Value 5": "24.000 psig", "Master Value 6": "30.000 psig", "Instrument Pressure 1": "-0.000 psig", "Instrument Pressure 2": "5.999 psig", "Instrument Pressure 3": "11.999 psig", "Instrument Pressure 4": "17.998 psig", "Instrument Pressure 5": "23.997 psig", "Instrument Pressure 6": "29.997 psig" } } }